JPH0518845Y2 - - Google Patents
Info
- Publication number
- JPH0518845Y2 JPH0518845Y2 JP11797887U JP11797887U JPH0518845Y2 JP H0518845 Y2 JPH0518845 Y2 JP H0518845Y2 JP 11797887 U JP11797887 U JP 11797887U JP 11797887 U JP11797887 U JP 11797887U JP H0518845 Y2 JPH0518845 Y2 JP H0518845Y2
- Authority
- JP
- Japan
- Prior art keywords
- inductively coupled
- coupled plasma
- mass spectrometer
- frequency
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 54
- 229910052786 argon Inorganic materials 0.000 claims description 27
- 150000002500 ions Chemical class 0.000 claims description 26
- 239000007789 gas Substances 0.000 claims description 22
- 238000009616 inductively coupled plasma Methods 0.000 claims description 14
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 12
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 12
- 239000012530 fluid Substances 0.000 claims description 10
- 230000006698 induction Effects 0.000 claims description 4
- 230000001105 regulatory effect Effects 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 7
- 230000003595 spectral effect Effects 0.000 description 4
- 150000001793 charged compounds Chemical class 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000001819 mass spectrum Methods 0.000 description 2
- 239000006199 nebulizer Substances 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
Landscapes
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11797887U JPH0518845Y2 (en]) | 1987-07-31 | 1987-07-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11797887U JPH0518845Y2 (en]) | 1987-07-31 | 1987-07-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6423868U JPS6423868U (en]) | 1989-02-08 |
| JPH0518845Y2 true JPH0518845Y2 (en]) | 1993-05-19 |
Family
ID=31361924
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11797887U Expired - Lifetime JPH0518845Y2 (en]) | 1987-07-31 | 1987-07-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0518845Y2 (en]) |
-
1987
- 1987-07-31 JP JP11797887U patent/JPH0518845Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6423868U (en]) | 1989-02-08 |
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